

IntelliSuite软件
一站式MEMS解决方案
Silicon and Quartz etching in FabSim
Virtual Fabrication with FabSim
Visualize complex MEMS (for process debug)
Export to PNG, AVI, PPT files etc..
Wet Etching process in FabSim
DRIE process in FabSim
Process simulation: DRIE processes with calibration
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Experiment results
Users can do DRIE etching experiment as we designed.
And use experiment results to calibrate Fabsim for their own device.
DRIE simulation by simple model
DRIE simulation without calibration
DRIE simulation with calibration
high index etch
一站式MEMS解决方案
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