结合材料、版图创建器件的工艺流程，并可输出到FabSim模块生成三维虚拟模型，输出到TEM模块进行分析。
◆ 完整的MEMS工艺流程，包括沉积、光刻、刻蚀、键合、电镀等工艺。用户可添加自有工艺;
◆ 支持标准MEMS工艺，如MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining等。
◆ 用户可创建自有工艺;
◆ 图形化的硅和石英等材料的各向异性湿法刻蚀速率展示与调节工具
◆ 支持SOI材料，支持电阻率与方块电阻参数同步;
◆ 支持输出Excel格式工艺流程单
◆ 结合FabSim模拟工艺流程生成的器件的三维模型;
◆ 结合TEM分析对器件的影响，实现更精确的多物理场模拟;
IntelliFAB™ - 流程编辑器
IntelliSuite自下而上的设计是以流程设计为基础。熟悉的工艺步骤，如光刻、薄膜沉积和选择性蚀刻，构成了最终器件几何形状的基础。
使用IntelliFABTM可以使用户在进入CleanRoom之前进行流程调试和版图优化。它使您能够快速创建精确的虚拟模型，并且可以防止流程错误带来的损失。
IntelliFAB – Process simulation
·Feature highlights
·Virtual prototyping
·Process validation
·Process databases
·Foundry ready templates
·Design - process integration
·Team collaboration
IntelliFab: Setup complex process flow
1.Process Editor for MEMS
IntelliFAB makes editing and organizing a process table quick and easy. Setup your virtual process traveller exactly as you would for a real foundry.
2.Group, section, organize
Grouping common sets of processes into process subsets makes the organizing a complex traveler easy. You can group your process flow in any which way you please: by material, by process type or by process option.
3.Process Pane
Enter process parameters,tolerances and visualization settings in a single consolidated pane
4.Filter with ease
Filtering tools allow you to quickly focus on the processes that you want to explore
Export process traveler
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